1, power supply: AC220V ± 10%, 50Hz, 15KW
2, the working pressure: 0.5 ~ 0.7Mpa (dry gas source)
3, the gas consumption: 300L / Min
4, equipment size: 3200 (L) × 1165 (W) × 1800 (H) mm
5, equipment weight: 3500KG
6, program control: PLC controller + touch screen
7, work: 1ACF +1 preload +3 the pressure
Constant temperature heating method
8, the corresponding size: 7 inch -15.6 inch
9, equipment accuracy: X: ± 10um Y: ± 12um
10, equipment T / T: 8 S