1, the power supply: AC220V ± 10%, 50Hz, 8KW
2, the working pressure: 0.5 ~ 0.7Mpa (dry gas source)
3, the amount of gas: 200L / Min
4, equipment size: 2150 (L) × 1150 (W) × 1800 (H) mm
5, equipment weight: 3000KG
6, program control: PLC controller + touch screen
7, work: 1ACF +1 preload +3 the pressure
Constant temperature heating method
8, the corresponding size: 3 inches -10.4 inches
9, equipment accuracy: X: ± 3um Y: ± 3um
10, equipment T / T: 4 S